Influence of gettering on aluminum ohmic contact formation
نویسندگان
چکیده
منابع مشابه
A Thermodynamic Approach to Ohmic Contact Formation to p-GaN
A new ohmic contact scheme for gallium nitride is presented. The use of Nitrideforming metal Over Gallide-forming metal, “NOG”, can modify the thermodynamic activity of N and Ga near the interface. This in turn can modify the near-surface point defect concentrations, particularly the vacancies of Ga and N. The principle of this contact scheme was shown to be consistent with results from Ni/Au, ...
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ژورنال
عنوان ژورنال: Технология и конструирование в электронной аппаратуре
سال: 2020
ISSN: 2309-9992,2225-5818
DOI: 10.15222/tkea2020.1-2.45